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Item # MX-MR-01, 0.450 Inch (in) Clear Aperture Mounted Retro Reflector


Mounted Retro Reflector configurations are used in DMI systems where there is only one axis being positioned or monitored on a given system or in an angular DMI system. In some cases, Mounted Retro Reflectors can be used in combination with a Single Axis Mirror to achieve very high resolution for the most demanding applications.

Motion X Corporation’s Mounted Retro Reflector configurations are designed in a compact footprint to work in even the most space-constrained applications.




Specifications  · Applications  · Technical Information

Specifications

Clear Aperture Size
0.450 in

Dimension A
0.810 in

Dimension B
0.100 in

Dimension C
0.500 in

Dimension D
0.600 in


Applications
DMIs are the primary measurement device for high-precision stage metrology in semiconductor metrology tools and lithography processes for the production of integrated circuits (ICs) and flat panel displays (FPDs). Additional applications include; characterization and calibration of machine tools, stages, piezoelectric transducers, encoders and grid plates.


Technical Information
Motion X Corporation’s line of homodyne DMI systems and components is extremely flexible and can be offered in many configurations that will suit your applications requirements. Our price versus performance is unmatched in the DMI market and we invite you to contact our sales department for more information regarding our line of DMI systems and DMI system components.


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