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Item # MX-RIR-PMD-ST-AB-ST-ST, Double-Pass Remote Interferometer/Receiver


Motion X Corporation's line of homodyne displacement measuring interferometer (DMI) systems and components offer both Remote Receiver / Interferometer combinations and stand alone Remote Receivers.




Specifications  · Applications  · Technical Information

Specifications

Description
Remote Interferometer/Receiver, Plane Mirror, Double-Pass, Straight, AQuadB

Type
Straight

Mirror Type
Plane


Applications
DMIs are the primary measurement device for high-precision stage metrology in semiconductor metrology tools and lithography processes for the production of integrated circuits (ICs) and flat panel displays (FPDs). Additional applications include; characterization and calibration of machine tools, stages, piezoelectric transducers, encoders and grid plates.


Technical Information
Motion X Corporation's line of homodyne DMI systems and components is extremely flexible and can be offered in many configurations that will suit your applications requirements. Our price versus performance is unmatched in the DMI market and we invite you to contact our sales department for more information regarding our line of DMI systems and DMI system components.


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Motion X Corporation